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CHME-4600: Introduction to Semiconductor Processing
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Introduction to Semiconductor Processing
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CHME-4600
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The basic processes of fabrication of silicon-based semiconductor devices with emphasis on the chemical principles and systems involved. Topics include materials preparation, oxide growth, lithography, diffusion, ion implantation, epitaxial growth, chemical-vapor deposition, vacuum deposition, reactive ion etching, and packaging technologies. Fabrication of both bipolar and FET devices is discussed with emphasis on manufacturing process flow and control. Process design methodology.
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3 credits
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Cross-listed with:
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< a class = "course-pill" href = "CHME-6964" > CHME-6964 Bioprocess Design< / a >
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none
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< th class = "year" > 2023< / th >
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< / td >
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Intro Semiconductor Proc (3c)
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< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 10/25
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< th class = "year" > 2005< / th >
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< / td >
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< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 9/25
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< tr >
< th class = "year" > 2004< / th >
< td class = "term spring offered-diff-code" >
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< / td >
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< / td >
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< / td >
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< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 9/30
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< tr >
< th class = "year" > 2002< / th >
< td class = "term spring not-offered" >
< / td >
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< / td >
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< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 14/30
< / span >
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< / td >
< / tr >
< tr >
< th class = "year" > 2001< / th >
< td class = "term spring not-offered" >
< / td >
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< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 22/35
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2000< / th >
< td class = "term spring not-offered" >
< / td >
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< / td >
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< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 17/40
< / span >
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< / tr >
< tr >
< th class = "year" > 1999< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 16/50
< / span >
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< / td >
< / tr >
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< th class = "year" > 1998< / th >
< td class = "term spring unscheduled" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 29/50
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