2023-02-10 05:09:16 +00:00
<!DOCTYPE html>
2023-02-10 04:02:50 +00:00
< html >
< head >
< title >
2023-03-15 14:27:52 +00:00
CHME-4600: Introduction to Semiconductor Processing
2023-02-10 04:02:50 +00:00
< / title >
2023-03-15 14:27:52 +00:00
< meta property = "og:title" content = "CHME-4600: Introduction to Semiconductor Processing" >
< meta property = "og:description" content = "The basic processes of fabrication of silicon-based semiconductor devices with emphasis on the chemical principles and systems involved. Topics include materials preparation, oxide growth, lithography, diffusion, ion implantation, epitaxial growth, chemical-vapor deposition, vacuum deposition, reactive ion etching, and packaging technologies. Fabrication of both bipolar and FET devices is discussed with emphasis on manufacturing process flow and control. Process design methodology." >
2023-02-10 04:31:43 +00:00
< link rel = "stylesheet" href = "../css/common.css" >
< link rel = "stylesheet" href = "../css/coursedisplay.css" >
2023-04-04 22:26:01 +00:00
< link rel = "stylesheet" href = "../css/themes.css" >
2023-02-17 02:21:36 +00:00
< link rel = "shortcut icon" href = "../favicon/quatalogIcon.png" >
< link rel = "icon" href = "../favicon/favicon.ico" >
< link rel = "apple-touch-icon" sizes = "180x180" href = "../favicon/apple-touch-icon.png" >
< link rel = "icon" type = "image/png" sizes = "32x32" href = "../favicon/favicon-32x32.png" >
< link rel = "icon" type = "image/png" sizes = "16x16" href = "../favicon/favicon-16x16.png" >
< link rel = "manifest" href = "../favicon/site.webmanifest" >
2023-02-11 00:01:14 +00:00
< script src = "../js/fuse.js" > < / script >
< script src = "../js/search_helper.js" > < / script >
2023-02-10 04:02:50 +00:00
< / head >
< body class = "search_plugin_added" >
< div id = "qlog-header" >
2023-02-10 05:09:16 +00:00
< a id = "qlog-wordmark" href = "../" > < svg > < use href = "../images/quatalogHWordmark.svg#QuatalogHWordmark" > < / use > < / svg > < / a >
2023-02-11 01:18:44 +00:00
< form onsubmit = "search_helper(event)" >
2023-02-10 21:00:10 +00:00
< input type = "text" id = "search" class = "header-search" placeholder = "Search..." >
< / form >
2023-02-10 04:02:50 +00:00
< / div >
< div id = "cd-flex" >
< div id = "course-info-container" >
< h1 id = "name" >
2023-03-15 14:27:52 +00:00
Introduction to Semiconductor Processing
2023-02-10 04:02:50 +00:00
< / h1 >
< h2 id = "code" >
CHME-4600
< / h2 >
< p >
2023-03-15 14:27:52 +00:00
The basic processes of fabrication of silicon-based semiconductor devices with emphasis on the chemical principles and systems involved. Topics include materials preparation, oxide growth, lithography, diffusion, ion implantation, epitaxial growth, chemical-vapor deposition, vacuum deposition, reactive ion etching, and packaging technologies. Fabrication of both bipolar and FET devices is discussed with emphasis on manufacturing process flow and control. Process design methodology.
2023-02-10 04:02:50 +00:00
< / p >
< div id = "cattrs-container" >
< span id = "credits-pill" class = "attr-pill" >
2023-02-22 04:39:06 +00:00
3 credits
2023-02-10 04:02:50 +00:00
< / span >
< / div >
2023-02-22 04:39:06 +00:00
< div id = "crosslist-container" >
< div id = "crosslist-title" class = "rel-info-title" >
Cross-listed with:
< / div >
< div id = crosslist-classes" class = "rel-info-courses" >
2023-03-14 02:11:09 +00:00
< a class = "course-pill" href = "CHME-6964" > CHME-6964 Bioprocess Design< / a >
2023-02-22 04:39:06 +00:00
< / div >
< / div >
2023-02-10 04:02:50 +00:00
< div id = "prereq-container" class = "rel-info-container" >
< div id = "prereq-title" class = "rel-info-title" >
Prereqs:
< / div >
< div id = "prereq-classes" class = "rel-info-courses" >
< span class = "none-rect" >
none
< / span >
< / div >
< / div >
< / div >
< div id = "past-container" >
2023-02-10 05:09:16 +00:00
< h1 id = "past-title" >
2023-02-10 04:02:50 +00:00
Past Term Data
< / h2 >
2023-02-10 04:31:43 +00:00
< input type = "radio" id = "simple-view-input" name = "view-select" value = "simple" checked = "checked" >
< input type = "radio" id = "detail-view-input" name = "view-select" value = "detailed" >
2023-02-10 04:02:50 +00:00
< div id = "opt-container" >
< div id = "key-panel" >
< div id = "yes-code" class = "key-code" >
< span class = "code-icon" id = "yes-code-icon" >
2023-02-10 05:09:16 +00:00
< svg > < use href = "../icons.svg#circle-check" > < / use > < / svg >
2023-02-10 04:02:50 +00:00
< / span >
Offered
< / div >
< div id = "no-code" class = "key-code" >
< span class = "code-icon" id = "no-code-icon" >
2023-02-10 05:09:16 +00:00
< svg > < use href = "../icons.svg#circle-no" > < / use > < / svg >
2023-02-10 04:02:50 +00:00
< / span >
Not Offered
< / div >
< div id = "diff-code" class = "key-code" >
< span class = "code-icon" id = "diff-code-icon" >
2023-02-10 05:09:16 +00:00
< svg > < use href = "../icons.svg#circle-question" > < / use > < / svg >
2023-02-10 04:02:50 +00:00
< / span >
Offered as Cross-Listing Only
< / div >
< div id = "nil-code" class = "key-code" >
< span class = "code-icon" id = "nil-code-icon" >
2023-02-10 05:09:16 +00:00
< svg > < use href = "../icons.svg#circle-empty" > < / use > < / svg >
2023-02-10 04:02:50 +00:00
< / span >
No Term Data
< / div >
< / div >
< div id = "control-panel" >
< label for = "simple-view-input" id = "simple-view-label" class = "view-option-label" >
< span class = "view-icon" id = "simple-view-icon" >
2023-02-10 05:09:16 +00:00
< span class = "view-icon-selected" > < svg > < use href = "../icons.svg#circle-dot" > < / use > < / svg > < / span >
< span class = "view-icon-unselected" > < svg > < use href = "../icons.svg#circle-empty" > < / use > < / svg > < / span >
2023-02-10 04:02:50 +00:00
< / span >
Simple View
< / label >
< label for = "detail-view-input" id = "detail-view-label" class = "view-option-label" >
< span class = "view-icon" id = "detail-view-icon" >
2023-02-10 05:09:16 +00:00
< span class = "view-icon-selected" > < svg > < use href = "../icons.svg#circle-dot" > < / use > < / svg > < / span >
< span class = "view-icon-unselected" > < svg > < use href = "../icons.svg#circle-empty" > < / use > < / svg > < / span >
2023-02-10 04:02:50 +00:00
< / span >
Detailed View
< / label >
< / div >
< / div >
2023-02-10 21:00:10 +00:00
< table id = "years-table" >
2023-02-10 04:02:50 +00:00
< thead >
< tr >
< th > < / th >
< th class = "spring season-label" > Spring< / th >
< th class = "summer season-label" colspan = "2" > Summer< / th >
< th class = "fall season-label" > Fall< / th >
< / tr >
< tr >
< th colspan = "2" > < / th >
< th class = "summer2 midsum-label" > (Session 1)< / th >
< th class = "summer3 midsum-label" > (Session 2)< / th >
< th > < / th >
< / tr >
< / thead >
< tbody >
< tr >
< th class = "year" > 2023< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2022< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2021< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2020< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2019< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
2023-02-22 04:39:06 +00:00
< td class = "term fall offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< / tr >
< tr >
< th class = "year" > 2018< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
2023-02-22 04:39:06 +00:00
< td class = "term fall offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< / tr >
< tr >
< th class = "year" > 2017< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2016< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2015< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2014< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2013< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2012< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
2023-02-22 04:39:06 +00:00
< td class = "term fall offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< / tr >
< tr >
< th class = "year" > 2011< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2010< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2009< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
2023-02-22 04:39:06 +00:00
< td class = "term fall offered-diff-code" >
2023-02-10 04:02:50 +00:00
< / td >
< / tr >
< tr >
< th class = "year" > 2008< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
< tr >
< th class = "year" > 2007< / th >
2023-02-22 04:39:06 +00:00
< td class = "term spring offered-diff-code" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
2023-02-10 04:02:50 +00:00
< / td >
2023-02-22 04:39:06 +00:00
< td class = "term fall offered-diff-code" >
< / td >
< / tr >
< tr >
< th class = "year" > 2006< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 10/25
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2005< / th >
< td class = "term spring offered-diff-code" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 9/25
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2004< / th >
< td class = "term spring offered-diff-code" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
2023-02-10 04:02:50 +00:00
< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
2023-02-22 04:39:06 +00:00
< tr >
< th class = "year" > 2003< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 9/30
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2002< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 14/30
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2001< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 22/35
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2000< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 17/40
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 1999< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 16/50
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 1998< / th >
< td class = "term spring unscheduled" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
Intro Semiconductor Proc (3c)
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 29/50
< / span >
< / div >
< / td >
< / tr >
2023-02-10 04:02:50 +00:00
< / tbody >
< / table >
< / div >
< / div >
< / body >
< / html >
