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CHME-4600: Introduction to Semiconductor Processing
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< meta property = "og:description" content = "The basic processes of fabrication of silicon-based semiconductor devices with emphasis on the chemical principles and systems involved. Topics include materials preparation, oxide growth, lithography, diffusion, ion implantation, epitaxial growth, chemical-vapor deposition, vacuum deposition, reactive ion etching, and packaging technologies. Fabrication of both bipolar and FET devices is discussed with emphasis on manufacturing process flow and control. Process design methodology." >
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Introduction to Semiconductor Processing
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CHME-4600
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The basic processes of fabrication of silicon-based semiconductor devices with emphasis on the chemical principles and systems involved. Topics include materials preparation, oxide growth, lithography, diffusion, ion implantation, epitaxial growth, chemical-vapor deposition, vacuum deposition, reactive ion etching, and packaging technologies. Fabrication of both bipolar and FET devices is discussed with emphasis on manufacturing process flow and control. Process design methodology.
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3 credits
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Cross-listed with:
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< a class = "course-pill" href = "CHME-6964" > CHME-6964 Topics in CHME< / a >
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none
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< th > < / th >
< th class = "spring season-label" > Spring< / th >
< th class = "summer season-label" colspan = "2" > Summer< / th >
< th class = "fall season-label" > Fall< / th >
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< th colspan = "2" > < / th >
< th class = "summer2 midsum-label" > (Session 1)< / th >
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< th class = "year" > 2024< / th >
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< th class = "year" > 2021< / th >
< td class = "term spring not-offered" >
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< td class = "term fall not-offered" >
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< th class = "year" > 2020< / th >
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< td class = "term spring offered-diff-code" >
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< td class = "term fall not-offered" >
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< th class = "year" > 2019< / th >
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< td class = "term fall offered-diff-code" >
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< th class = "year" > 2018< / th >
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< td class = "term spring offered-diff-code" >
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< td class = "term fall offered-diff-code" >
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< th class = "year" > 2017< / th >
< td class = "term spring not-offered" >
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< td class = "term fall not-offered" >
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< / tr >
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< th class = "year" > 2016< / th >
< td class = "term spring not-offered" >
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< td colspan = "2" class = "term summer not-offered" >
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< td class = "term fall not-offered" >
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< th class = "year" > 2015< / th >
< td class = "term spring not-offered" >
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< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
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< tr >
< th class = "year" > 2014< / th >
< td class = "term spring not-offered" >
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< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
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< tr >
< th class = "year" > 2013< / th >
< td class = "term spring not-offered" >
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< td colspan = "2" class = "term summer not-offered" >
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< td class = "term fall not-offered" >
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< th class = "year" > 2012< / th >
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< td class = "term spring offered-diff-code" >
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< / td >
< td colspan = "2" class = "term summer not-offered" >
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< td class = "term fall offered-diff-code" >
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< / td >
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< th class = "year" > 2011< / th >
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< td class = "term spring offered-diff-code" >
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< td colspan = "2" class = "term summer not-offered" >
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< td class = "term fall not-offered" >
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< th class = "year" > 2010< / th >
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< td class = "term spring offered-diff-code" >
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< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall not-offered" >
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< tr >
< th class = "year" > 2009< / th >
< td class = "term spring not-offered" >
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< td colspan = "2" class = "term summer not-offered" >
< / td >
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< td class = "term fall offered-diff-code" >
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< td class = "term spring not-offered" >
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< / td >
< td class = "term fall not-offered" >
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< th class = "year" > 2007< / th >
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< td class = "term spring offered-diff-code" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
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< / td >
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< td class = "term fall offered-diff-code" >
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< td class = "term spring not-offered" >
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< a href = "https://sis.rpi.edu/rss/bwckctlg.p_disp_listcrse?term_in=200609&subj_in=CHME&crse_in=4600&schd_in=" > Intro Semiconductor Proc (3c)< / a >
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< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 10/25
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2005< / th >
< td class = "term spring offered-diff-code" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
2023-04-05 18:33:00 +00:00
< a href = "https://sis.rpi.edu/rss/bwckctlg.p_disp_listcrse?term_in=200509&subj_in=CHME&crse_in=4600&schd_in=" > Intro Semiconductor Proc (3c)< / a >
2023-02-22 04:39:06 +00:00
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 9/25
< / span >
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< / td >
< / tr >
< tr >
< th class = "year" > 2004< / th >
< td class = "term spring offered-diff-code" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
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< / td >
< td class = "term fall not-offered" >
< / td >
< / tr >
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< tr >
< th class = "year" > 2003< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
2023-04-05 18:33:00 +00:00
< a href = "https://sis.rpi.edu/rss/bwckctlg.p_disp_listcrse?term_in=200309&subj_in=CHME&crse_in=4600&schd_in=" > Intro Semiconductor Proc (3c)< / a >
2023-02-22 04:39:06 +00:00
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 9/30
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2002< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
2023-04-05 18:33:00 +00:00
< a href = "https://sis.rpi.edu/rss/bwckctlg.p_disp_listcrse?term_in=200209&subj_in=CHME&crse_in=4600&schd_in=" > Intro Semiconductor Proc (3c)< / a >
2023-02-22 04:39:06 +00:00
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 14/30
< / span >
< / div >
< / td >
< / tr >
< tr >
< th class = "year" > 2001< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
2023-04-05 18:33:00 +00:00
< a href = "https://sis.rpi.edu/rss/bwckctlg.p_disp_listcrse?term_in=200109&subj_in=CHME&crse_in=4600&schd_in=" > Intro Semiconductor Proc (3c)< / a >
2023-02-22 04:39:06 +00:00
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 22/35
< / span >
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< / td >
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< th class = "year" > 2000< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
2023-04-05 18:33:00 +00:00
< a href = "https://sis.rpi.edu/rss/bwckctlg.p_disp_listcrse?term_in=200009&subj_in=CHME&crse_in=4600&schd_in=" > Intro Semiconductor Proc (3c)< / a >
2023-02-22 04:39:06 +00:00
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 17/40
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< / td >
< / tr >
< tr >
< th class = "year" > 1999< / th >
< td class = "term spring not-offered" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
2023-04-05 18:33:00 +00:00
< a href = "https://sis.rpi.edu/rss/bwckctlg.p_disp_listcrse?term_in=199909&subj_in=CHME&crse_in=4600&schd_in=" > Intro Semiconductor Proc (3c)< / a >
2023-02-22 04:39:06 +00:00
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 16/50
< / span >
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< / td >
< / tr >
< tr >
< th class = "year" > 1998< / th >
< td class = "term spring unscheduled" >
< / td >
< td colspan = "2" class = "term summer not-offered" >
< / td >
< td class = "term fall offered" >
< div class = "view-container detail-view-container" >
< span class = "term-course-info" >
2023-04-05 18:33:00 +00:00
< a href = "https://sis.rpi.edu/rss/bwckctlg.p_disp_listcrse?term_in=199809&subj_in=CHME&crse_in=4600&schd_in=" > Intro Semiconductor Proc (3c)< / a >
2023-02-22 04:39:06 +00:00
< / span >
< ul class = "prof-list" >
< li > Timothy Cale< / li >
< / ul >
< span class = "course-capacity" >
Seats Taken: 29/50
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2023-02-10 04:02:50 +00:00
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