Vacuum Techniques

MTLE-6400

Principles and practice of producing, measuring, and using pressures from atmospheric down to 10-15 atmospheres. Gas kinetics and flow of gases at low pressures. Basic vacuum system calculations. System design and leak detection. Physical and chemisorption of gases. Generation of clean surfaces and study of reactions on them.

? credits
Prereqs:
none

Past Term Data

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Offered as Cross-Listing Only
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(Session 1) (Session 2)
2023
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