Integrated Circuit Fabrication Laboratory

ECSE-6300

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied.

3 credits

Past Term Data

Offered
Not Offered
Offered as Cross-Listing Only
No Term Data
Spring Summer Fall
(Session 1) (Session 2)
2023
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 10/25
2022
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 14/25
2021
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 7/24
2020
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 15/25
2019
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 11/25
2018
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 15/25
2017
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 4/25
2016
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 8/25
2015
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 10/25
2014
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 10/25
2013
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 12/25
2012
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 5/25
2011
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 14/25
2010
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 12/25
2009
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 16/25
2008
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
  • Jianqiang Lu
Seats Taken: 18/25
2007
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 19/30
2006
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 21/28
2005
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 13/28
2004
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 20/28
2003
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 22/28
2002
Ic Fabrication Lab (3c)
  • Shyam P Murarka
Seats Taken: 15/28
2001
2000
1999
Ic Fabrication Lab (3c)
  • Shyam P Murarka
Seats Taken: 14/80
1998