VLSI Fabrication Technology

ECSE-6240

Fabrication technology for silicon and gallium arsenide integrated circuits with emphasis on sub-micron structures. Topics include epitaxy, diffusion, binary and ternary phase diagrams, grown and deposited oxides and nitrides, polysilicon and silicide technology, single-and multi-metal systems, plasma and chemical etching, ion milling photo, e-beam and X-ray lithography.

3 credits
Prereqs:
none

Past Term Data

Offered
Not Offered
Offered as Cross-Listing Only
No Term Data
Spring Summer Fall
(Session 1) (Session 2)
2023
2022
2021
2020
2019
2018
2017
Vlsi Fabrication Tech (3c)
  • Ishwara B Bhat
Seats Taken: 4/36
2016
2015
Vlsi Fabrication Tech (3c)
  • Ishwara B Bhat
Seats Taken: 7/36
2014
2013
2012
Vlsi Fabrication Tech (3c)
  • Ishwara B Bhat
Seats Taken: 6/36
2011
2010
Vlsi Fabrication Tech (3c)
  • Ishwara B Bhat
Seats Taken: 11/32
2009
2008
Vlsi Fabrication Tech (3c)
  • Ishwara B Bhat
Seats Taken: 7/30
2007
2006
Vlsi Fabrication Tech (3c)
  • Ishwara B Bhat
Seats Taken: 16/25
2005
2004
Vlsi Fabrication Tech (3c)
  • Ishwara B Bhat
Seats Taken: 11/20
2003
2002
Vlsi Fabrication Tech (3c)
  • Ishwara B Bhat
Seats Taken: 18/40
2001
2000
1999
1998