Ic Fabrication Lab

MTLE-6300

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied.

3 credits
Cross-listed with:

Past Term Data

Offered
Not Offered
Offered as Cross-Listing Only
No Term Data
Spring Summer Fall
(Session 1) (Session 2)
2025
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 2/3
2024
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 0/10
2023
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 0/10
2022
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 0/20
2021
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 1/20
2020
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 1/20
2019
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 3/20
2018
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 3/20
2017
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 1/20
2016
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 1/20
2015
Ic Fabrication Lab (3c)
  • Michael J Wozny
  • Tat-Sing Chow
Seats Taken: 3/20
2014
Ic Fabrication Lab (3c)
  • Michael J Wozny
  • Tat-Sing Chow
Seats Taken: 5/20
2013
Ic Fabrication Lab (3c)
  • Michael J Wozny
  • Tat-Sing Chow
Seats Taken: 9/20
2012
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 1/20
2011
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 6/20
2010
Ic Fabrication Lab (3c)
  • Jianqiang Lu
Seats Taken: 5/20
2009
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
  • Jianqiang Lu
Seats Taken: 3/20
2008
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
  • Jianqiang Lu
Seats Taken: 1/20
2007
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 3/30
2006
2005
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 2/28
2004
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 4/28
2003
Ic Fabrication Lab (3c)
  • Tat-Sing Chow
Seats Taken: 3/22
2002
Ic Fabrication Lab (3c)
  • Shyam P Murarka
Seats Taken: 11/28
2001
2000
1999
Ic Fabrication Lab (3c)
  • Shyam P Murarka
Seats Taken: 5/37
1998