VLSI Fabrication Technology

ECSE-6240

Fabrication technology for silicon and gallium arsenide integrated circuits with emphasis on sub-micron structures. Topics include epitaxy, diffusion, binary and ternary phase diagrams, grown and deposited oxides and nitrides, polysilicon and silicide technology, single-and multi-metal systems, plasma and chemical etching, ion milling photo, e-beam and X-ray lithography.

3 credits

Prereqs:

none

Past Term Data

Offered

Not Offered

Offered as Cross-Listing Only

No Term Data

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	Spring	Summer
		(Session 1)	(Session 2)
2023
2022
2021
2020
2019
2018
2017	Vlsi Fabrication Tech (3c) Ishwara B Bhat Seats Taken: 4/36
2016
2015	Vlsi Fabrication Tech (3c) Ishwara B Bhat Seats Taken: 7/36
2014
2013
2012	Vlsi Fabrication Tech (3c) Ishwara B Bhat Seats Taken: 6/36
2011
2010	Vlsi Fabrication Tech (3c) Ishwara B Bhat Seats Taken: 11/32
2009
2008	Vlsi Fabrication Tech (3c) Ishwara B Bhat Seats Taken: 7/30
2007