# Vlsi Fabrication Tech

## ECSE-6240

Fabrication technology for silicon and gallium arsenide integrated circuits with emphasis on sub-micron structures. Topics include epitaxy, diffusion, binary and ternary phase diagrams, grown and deposited oxides and nitrides, polysilicon and silicide technology, single-and multi-metal systems, plasma and chemical etching, ion milling photo, e-beam and X-ray lithography.

3 credits
Prereqs:
none

# Past Term Data
Offered
Not Offered
Offered as Cross-Listing Only
No Term Data
Simple View
Detailed View

| Spring | Summer | Fall
--- | --- | --- | ---
| (Session 1) | (Session 2) |
2026 |  |  |
2025 |  |  |
2024 |  |  |
2023 |  |  |
2022 |  |  |
2021 |  |  |
2020 |  |  |
2019 |  |  |
2018 |  |  |

2017

Vlsi Fabrication Tech (3c)

- Ishwara B Bhat

Seats Taken: 4/36

2016 |  |  |

2015

Vlsi Fabrication Tech (3c)

- Ishwara B Bhat

Seats Taken: 7/36

2014 |  |  |
2013 |  |  |

2012

Vlsi Fabrication Tech (3c)

- Ishwara B Bhat

Seats Taken: 6/36

2011 |  |  |

2010

Vlsi Fabrication Tech (3c)

- Ishwara B Bhat

Seats Taken: 11/32

2009 |  |  |

2008

Vlsi Fabrication Tech (3c)

- Ishwara B Bhat

Seats Taken: 7/30

2007 |  |  |

2006

Vlsi Fabrication Tech (3c)

- Ishwara B Bhat

Seats Taken: 16/25

2005 |  |  |

2004

Vlsi Fabrication Tech (3c)

- Ishwara B Bhat

Seats Taken: 11/20

2003 |  |  |

2002

Vlsi Fabrication Tech (3c)

- Ishwara B Bhat

Seats Taken: 18/40

2001 |  |  |
2000 |  |  |
1999 |  |  |
1998 |  |  |