# Ic Fabrication Lab

## ECSE-6300

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied.

3 credits
Cross-listed with:
MTLE-6300 Ic Fabrication Lab
Prereqs:
ECSE-4250 Ic Proc & Design

# Past Term Data
Offered
Not Offered
Offered as Cross-Listing Only
No Term Data
Simple View
Detailed View

| Spring | Summer | Fall
--- | --- | --- | ---
| (Session 1) | (Session 2) |

2026

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 6/18

2025

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 13/15

2024

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 8/24

2023

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 10/25

2022

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 14/25

2021

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 7/24

2020

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 15/25

2019

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 11/25

2018

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 15/25

2017

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 4/25

2016

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 8/25

2015

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 10/25

2014

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 10/25

2013

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 12/25

2012

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 5/25

2011

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 14/25

2010

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 12/25

2009

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 16/25

2008

Ic Fabrication Lab (3c)

- Tat-Sing Chow
- Jianqiang Lu

Seats Taken: 18/25

2007

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 19/30

2006

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 21/28

2005

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 13/28

2004

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 20/28

2003

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 22/28

2002

Ic Fabrication Lab (3c)

- Shyam P Murarka

Seats Taken: 15/28

2001 |  |  |
2000 |  |  |

1999

Ic Fabrication Lab (3c)

- Shyam P Murarka

Seats Taken: 14/80

1998 |  |  |