# Integrated Circuit Fabrication Laboratory

## ECSE-6300

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied.

3 credits
Cross-listed with:
MTLE-6300 Integrated Circuit Fabrication Laboratory
Prereqs:
ECSE-4250 Integrated Circuit Processes and Design

# Past Term Data
Offered
Not Offered
Offered as Cross-Listing Only
No Term Data
Simple View
Detailed View

| Spring | Summer | Fall
--- | --- | --- | ---
| (Session 1) | (Session 2) |
2024 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 3/24 |  |
2023 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 10/25 |  |
2022 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 14/25 |  |
2021 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 7/24 |  |
2020 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 15/25 |  |
2019 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 11/25 |  |
2018 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 15/25 |  |
2017 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 4/25 |  |
2016 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 8/25 |  |
2015 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 10/25 |  |
2014 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 10/25 |  |
2013 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 12/25 |  |
2012 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 5/25 |  |
2011 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 14/25 |  |
2010 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 12/25 |  |
2009 | Ic Fabrication Lab (3c) Jianqiang Lu Seats Taken: 16/25 |  |
2008 | Ic Fabrication Lab (3c) Tat-Sing Chow Jianqiang Lu Seats Taken: 18/25 |  |
2007 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 19/30 |  |
2006 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 21/28 |  |
2005 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 13/28 |  |
2004 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 20/28 |  |
2003 | Ic Fabrication Lab (3c) Tat-Sing Chow Seats Taken: 22/28 |  |
2002 | Ic Fabrication Lab (3c) Shyam P Murarka Seats Taken: 15/28 |  |
2001 |  |  |
2000 |  |  |
1999 | Ic Fabrication Lab (3c) Shyam P Murarka Seats Taken: 14/80 |  |
1998 |  |  |