# MTLE-6300: Integrated Circuit Fabrication Laboratory

# Integrated Circuit Fabrication Laboratory

## MTLE-6300

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied.

3 credits
Cross-listed with:
ECSE-6300 Integrated Circuit Fabrication Laboratory
Prereqs:
ECSE-4250 Integrated Circuit Processes and Design

# Past Term Data
Offered
Not Offered
Offered as Cross-Listing Only
No Term Data
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| Spring | Summer | Fall
--- | --- | --- | ---
| (Session 1) | (Session 2) |

2023

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 0/10

2022

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 0/20

2021

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 1/20

2020

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 1/20

2019

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 3/20

2018

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 3/20

2017

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 1/20

2016

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 1/20

2015

Ic Fabrication Lab (3c)

- Michael J Wozny
- Tat-Sing Chow

Seats Taken: 3/20

2014

Ic Fabrication Lab (3c)

- Michael J Wozny
- Tat-Sing Chow

Seats Taken: 5/20

2013

Ic Fabrication Lab (3c)

- Michael J Wozny
- Tat-Sing Chow

Seats Taken: 9/20

2012

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 1/20

2011

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 6/20

2010

Ic Fabrication Lab (3c)

- Jianqiang Lu

Seats Taken: 5/20

2009

Ic Fabrication Lab (3c)

- Tat-Sing Chow
- Jianqiang Lu

Seats Taken: 3/20

2008

Ic Fabrication Lab (3c)

- Tat-Sing Chow
- Jianqiang Lu

Seats Taken: 1/20

2007

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 3/30

2006 |  |  |

2005

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 2/28

2004

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 4/28

2003

Ic Fabrication Lab (3c)

- Tat-Sing Chow

Seats Taken: 3/22

2002

Ic Fabrication Lab (3c)

- Shyam P Murarka

Seats Taken: 11/28

2001 |  |  |
2000 |  |  |

1999

Ic Fabrication Lab (3c)

- Shyam P Murarka

Seats Taken: 5/37

1998 |  |  |